型號(hào) |
C544 |
C574 | |
測(cè)量范圍 |
X軸 |
505mm(20") |
505mm(20") |
Y軸 |
405mm(16") |
705mm(28") | |
Z軸 |
405mm(16") |
405mm(16") | |
分辨率 |
0.0001mm(.000004") | ||
200C時(shí)的精度ISO10360-2 |
EPEE=(1.9+3L/1000)µm*(1.7+3L/1000) µm**
MPEP=1.9µm/1.7µm |